Kinetics of Generation of Thermal Donors in Silicon of Stabilization of States of Fast-Diffusing Impurities
Shoikrom Askarov,
Bashirulla Sharipov,
Shokhista Saliyeva,
Abdulaziz Mavlyanov,
Solizhon Srazev,
Tuchi Toshboev
Issue:
Volume 7, Issue 1, June 2020
Pages:
1-5
Received:
3 June 2019
Accepted:
13 August 2019
Published:
8 January 2020
Abstract: The paper reports that the intensity of generation and the concentration of low-temperature thermal donors (LTD) at 450°C in silicon, where fast diffusing impurities (FDI) are stabilized by means of binding them into electrically neutral chemically bound complexes with sulfur, are significantly lower compared to their intensity and concentration in reference samples of silicon doped with sulfur and pure reference samples. The “Kaiser model” states that the initial rate of generation of low-temperature thermal donors is proportional to biquadrate, and their maximum concentration is to the third degree of oxygen concentration. According to the Kaiser model of thermal donor generation, LTD represent predominantly stable tetrahedrons (i.e. SiO4 molecules). However, the Kaiser model does not take into account the possibility of interaction of oxygen with other impurities that might lead to the formation of electrically active centers. Based on the analysis of experimental results of Si<S> samples subjected to heat treatment the authors recommend a revision of the principles of LTD in silicon in view of behavior of FDI, as they play a key role in the process of the formation of LTD. Thus, in the present paper the authors effectively are attempting to shed light on the anticipated role of impurity centers with deep levels in the process of formation of thermal donors.
Abstract: The paper reports that the intensity of generation and the concentration of low-temperature thermal donors (LTD) at 450°C in silicon, where fast diffusing impurities (FDI) are stabilized by means of binding them into electrically neutral chemically bound complexes with sulfur, are significantly lower compared to their intensity and concentration in...
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